Deposition of ZrON thin films by reactive magnetron sputtering using a hollow cylindrical target: Journal of Vacuum Science & Technology A: Vol 36, No 6
Cylindrical and Rotating Magnetron Sputtering – Vacuum Technology & Coating Blog
Color online) Scheme illustrating the homemade hollow cylindrical... | Download Scientific Diagram
PDF] Design and Fabrication of a DC Cylindrical Magnetron Sputtering Device | Semantic Scholar
Basic principles of a DC MSS with single cylindrical magnetron. (a)... | Download Scientific Diagram
Magnetron Sputtering - an overview | ScienceDirect Topics
Industrial-scale deposition of highly uniform and precise optical interference filters by the use of an improved cylindrical magnetron sputtering system - ScienceDirect